µã»÷ÓÒÉϽÇ΢ÐźÃÓÑ
ÅóÓÑȦ
ÇëʹÓÃä¯ÀÀÆ÷·ÖÏí¹¦ÄܽøÐзÖÏí
55666 bong884ÔÂ28ÈÕ£¬ÀîСÁÕÒ»Ðи°ÉϺ£½»Í¨´óѧ·ÃÎÊ×ù̸£¬¸ÃУµ³Î¯Êé¼Ç½ªË¹Ïܵȳöϯ×ù̸»á¡£×ù̸»áÉÏ£¬Ë«·½´ú±íΧÈÆÉϺ£½»´óºÍ˿·¹æ»®Ñо¿ÖÐÐÄÈçºÎЯÊÖ·þÎñ¹ú¼Ò¡°Ò»´øһ·¡±ºÏ×÷·¢Õ¹Õ½ÂÔÕ¹¿ªÁË»ý¼«ÓÐÒæµÄ̽Ìֺͽ»Á÷¡£ÔÚÖйú´«Í³ÎÄ»¯À»Ø¼Ò³Ô·¹ÊǶÔÉú»î×î±¾ÕæµÄ»Ø¹é¡£µ«Èç½ñ£¬ÔÚ¸ßѹÁ¦¡¢¿ì½Ú×à¡¢Öؽá¹ûµÄÉç»áÉú»îÖУ¬ÓÈÆäÊǶÔÓÚ¹ã´óµ³Ô±¸É²¿À´Ëµ£¬»Ø¼Ò³Ô·¹ËƺõÕý±äµÃ¡°ÎïÒÔϡΪ¹ó¡±¡£
2001.04-2003.07ÖйúÈËÃñÒøÐÐÎ人·ÖÐи±Ðг¤¡¢µ³Î¯Î¯Ô±´Ëºó£¬³¤½´æ´¢Ò²ÓÀ´ÁË×Ô¼ºµÄµÚһ̨¹â¿Ì»ú£¬Í¬ÑùÀ´×ÔASML£¬²»¹ýÊÇ193nm³Á½þʽ£¬ÓÃÓÚ²ú20-14nm¹¤ÒÕµÄ3DNANDÉÁ´æ¾§Ô²£¬7200ÍòÃÀԪһ̨¡£Ð¾©±¨¿ìѶ(¼ÇÕßÍõìÏ)½ñÈÕ(28ÈÕ)£¬Ð¾©±¨¼ÇÕß´ÓÉÂÎ÷Ê¡°²¿µÊÐÖм¶ÈËÃñ·¨Ôº»ñϤ£¬°²¿µ¡°Á½½ãÃÃÓöº¦¡±Ò»°¸ÐÐÐ×Õ߳ɹúÁÖ£¬ÒÑÓÚ5ÔÂ25ÈÕ±»Ö´ÐÐËÀÐÌ¡£
ÑÛ¿´ÕÉĸÄïºÍÆäËû¼ÒÈËÓÖÆðÁËÒÉÐÄ£¬4ÔÂ3ÈÕ£¬ÌÆijÓֵǼÁËСҶµÄ΢ÐÅ£¬·¢ÅóÓÑȦ¡°±¨Æ½°²¡±£¬ÎªÁËÈôó¼ÒÏàÐÅ£¬Ëû»¹°Ñ·¢Ë͵ØÊÖ¶¯¸Ä³ÉÁËÉϺ£µÏÊ¿ÄáÀÖÔ°¡£
´ËÇ°Ìì½ò·½Ã湫²¼£¬ÔÚº£ºÓ¼Æ»®ÉÏÏߵĵÚÒ»Ì죬ÉêÇëÈËÊý¾ÍÍ»ÆÆÁË30Íò£¬¼´±ã³ǫ̈Á˶àÏî´ò²¹¶¡Õþ²ß£¬Ìá¸ßÁËÂ仧Ãż÷£¬µ«Î´À´ÈÔ»áÓÐÏ൱ÊýÁ¿µÄÐÂÌì½òÈËÈëס£¬ÆäÖд󲿷ֶ¼ÊDZ±Æ¯µÄ¹º·¿ÈË£¬ÆäÊýÁ¿Ô¶Ô¶³¬¹ýÁËÌì½òÂ¥ÊÐÒ»ÄêµÄ³É½»Á¿¡£½©³Öµ½ÏÂÎçµÄËÄÎåµãÖÓ£¬Ôì·´ÅÉÃÇһֱûÓÐÄܳå½øÌúË¿ÍøÀ¹³öµÄ¿âÇø£¬±ã×ö³ö×îºóµÄÕõÔú¡£¼¸°ÙÈËÍÆ×ÅսʿÃÇÍù¿âÇø½Ó½ü£¬°ÙÓàÈËÒѾ³åµ½ÁË×îºóÒ»µÀÌúË¿ÍøÇ°£¬¾ÖÃæËƺõÒªÍêȫʧ¿ØÁË¡£